UHV-Versteller
81825-D München
2/B Unnützstrasse
+49 89 42024207
+49 89 42024206
Ultra small miniature translation stages with piezo electric inertial drive for UHV applications.
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Ultra small miniature translation stages with piezoelectric actuators are compact positioning systems that utilize the principle of piezoelectricity to achieve precise linear motion in micro- and nano-scale applications. Here are some key features and characteristics of such stages:
- Compact Size: These translation stages are extremely small in size, typically ranging from a few millimeters to centimeters in dimensions. Their compact design allows for integration into tight spaces or environments with limited space.
- Piezoelectric Actuators: The stages employ piezoelectric actuators as the driving mechanism. Piezoelectric materials exhibit the property of deformation when subjected to an electric field, enabling precise and rapid motion control at the microscale level.
- High Precision and Resolution: Piezoelectric actuators offer high precision and resolution, often in the sub-micrometer or nanometer range. This allows for precise positioning and manipulation of objects at the micro- and nano-scale with exceptional accuracy.
- Rapid Response and Dynamic Performance: Piezoelectric actuators have fast response times, enabling high-speed motion and dynamic operation of the translation stages. They can achieve rapid acceleration and deceleration, making them suitable for applications requiring quick and precise movements.
- Closed-Loop Control: Many ultra-small miniature translation stages with piezoelectric actuators incorporate closed-loop control systems. These systems utilize position sensors, such as capacitive sensors or strain gauges, to provide real-time feedback and ensure accurate positioning control.
- Flexibility in Travel Range: Despite their small size, these stages can offer a range of travel distances, typically from a few micrometers to several millimeters. The specific travel range depends on the design and specifications of the particular stage.
- Application Versatility: Ultra small miniature translation stages with piezoelectric actuators find applications in various fields, including microscopy, semiconductor manufacturing, biotechnology, nanotechnology, and optics. They are used for tasks such as sample scanning, optical alignment, nanopositioning, and micromanipulation.
Width : 22 mm
Height : 7 mm
Depth : 15 mm
Travel : 10 mm
Article Number : MS.015.1090
Mass : 20 g
Velocity : 1.5 mm/s
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