Kinemetical mirror tilting stage with piezo electric inertial drive

A kinematic mirror tilting stage with a piezoelectric inertial drive is a specialized mechanical device designed for precise and controlled tilting or angling of mirrors or other optical components in optical and laser applications. Here's an explanation of its key components and functionalities: 1. Kinematic Mirror Tilting Stage: The kinematic mirror tilting stage is a precision mechanical stage that holds and allows controlled angular adjustments of a mirror or optical component. The term "kinematic" suggests that it employs a specific type of design known as kinematic coupling, which ensures precise and repeatable positioning. Kinematic stages are often used in optical setups where stability and accuracy are paramount. 2. Piezoelectric Inertial Drive: The piezoelectric inertial drive, as mentioned earlier, is a type of actuation system that utilizes piezoelectric elements to generate precise and rapid motion. In this context, it provides the driving force for the angular adjustment of the mirror on the kinematic stage. Key Features and Functions:

• High Precision: The combination of a kinematic stage and a piezoelectric inertial drive offers exceptionally high precision in mirror tilting, often with sub-microradian or sub-milliarcsecond resolution.
• Rapid Response: Piezoelectric actuators have a rapid response time, allowing for fast and precise angular adjustments of the mirror.
• Stability: Kinematic coupling ensures stable and repeatable positioning, which is crucial for maintaining optical alignment over time.

Applications: A kinematic mirror tilting stage with a piezoelectric inertial drive finds applications in various optical and laser systems, including:

1. Laser Beam Steering: Used for precise control of laser beam direction in research, laser machining, and laser-based material processing.
2. Interferometry: Applied in interferometric setups, such as Michelson or Fabry-Perot interferometers, to adjust and control the angles of mirrors for interference pattern manipulation.
3. Optical Alignment: In optical setups, it is used to align mirrors, lenses, and other optical components to achieve desired optical paths and beam paths.
4. Beam Collimation: Used to adjust and optimize the collimation of laser beams for applications like laser diode testing and optical communication.
5. Precision Metrology: Applied in applications requiring precise angular measurements, such as angular displacement sensors or laser-based position sensing.
6. Laser Scanning Microscopy: Utilized in confocal microscopy and laser scanning microscopy systems for beam scanning and sample imaging.

Angular adjustment 6deg (+-3deg) in two axes

With mirror adapter for mirrors larger than dia. 12.7mm

Free opening of 9mm