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Multi-chamber Systems with Substrate Handling under Vacuum

Multi-chamber Systems with Substrate Handling under Vacuum by Aurion Anlagentechnik GmbH

Aurion Anlagentechnik GmbH

63500-D Seligenstadt
        14 Am Sandborn

+49 6182 96280

+49 6182 962816

Multi-chamber Systems with Substrate handling under Vacuum


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Beschreibung
Cluster Systems AURION offers multi-chamber Systems with Substrate handling under Vacuum that are specially tailored to your Requirements. Configurations available include load Lock chambers, Transfer chambers and Process modules for sputtering and RIE Processes.
Produktparameter

Lock chamber

Transfer chamber

Bilder

Multi-chamber Systems with Substrate Handling under Vacuum


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