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AURION PECVD systems

Atmospheric pressure plasma sources

Aurion Anlagentechnik GmbH

63500-D Seligenstadt
        14 Am Sandborn

+49 6182 96280

+1 6182 962816

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AURION PECVD systems as well as combinations thereof, including cluster and inline tools.


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Beschreibung

PLASMA SYSTEMS

Atmospheric pressure plasma sources, RIE, microwave downstream plasma, PVD (Sputtering) and PECVD systems as well as combinations thereof, including cluster and inline tools.
Produktparameter

Cluster and inline tools

Sputtering

Bilder

AURION PECVD systems

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