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Kivos vacuum chamber Model 350

KIVOS vacuum chamber

Aurion Anlagentechnik GmbH

63500-D Seligenstadt
        14 Am Sandborn

+49 6182 96280

+1 6182 962816

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KIVOS 350 Vacuum chamber

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AURION plasma systems usually come mounted on a stand which can hold all of the components (chamber, pump stand, generators, control system). Due to its modular construction style, this stand is also very flexible and can easily be modified. Clean room sheathings are available on request.

Material of the frame : stainless steel

Material of the modules : aluminum or stainless steel

Leak rate : < 5×10-5 mbar×l/s

Flanges : according to customer specification


Kivos vacuum chamber Model 350

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