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turbo drag pumps with a rated nominal throughput

turbo drag pumps with a rated nominal throughput

Aurion Anlagentechnik GmbH

PLASMA GENERATOR

AURION supplies complete plasma sources

Aurion Anlagentechnik GmbH

Impedance matching networks

RF Components

Aurion Anlagentechnik GmbH

RF systems for particle accelerators

RF systems for particle accelerator

Aurion Anlagentechnik GmbH

KIVOS is a very flexible modular concept for plasma systems

highly developed products at a low price

Aurion Anlagentechnik GmbH

KIVOS 350 Vacuum chamber

KIVOS vacuum chamber

Aurion Anlagentechnik GmbH

KIVOS 500 vacuum chamber

stainless steel vacuum chamber

Aurion Anlagentechnik GmbH

The pumping station for vacuum generation is specifically designed for the individual applications.

pumping station for vacuum

Aurion Anlagentechnik GmbH

KIVOS 750 vacuum chamber

flexible modular concept for plasma systems

Aurion Anlagentechnik GmbH

3DWire

Fully Automatic Atmospheric Pressure Sputtering System

3DWire Fully Automatic System

Aurion Anlagentechnik GmbH



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