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Aurion Atmospheric Pressure Sputtering System

3DWire Fully Automatic System

Aurion Anlagentechnik GmbH

63500-D Seligenstadt
        14 Am Sandborn

+49 6182 96280

+1 6182 962816

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3DWire

Fully Automatic Atmospheric Pressure Sputtering System


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Beschreibung
Motivation: Reducing the cost of manufacturing processes (replacing expensive vacuum equipment) by 3D-metallization on complex geometries, e.g. harsh-environment sensor housings.   Solution: Direct deposition of wire leads and bond pads (electrical connection between sensor element and periphery) on insulators by sputtering process at atmospheric pressure.   Technical Data: Coating materials: Au, Pt, Pd, Ag Substrate sizes: no process limits, depending on application, e.g. 7 mm long, diameter 6 mm           Throughput: depending on application, e.g. 32 pcs/day Supplies: 230 V / 50 Hz, compressed air, Helium Control, operation: PLC, PC with touch panel monitor
Produktparameter

Coating materials : Au, Pt, Pd, Ag

Throughput : depending on application

Substrate sizes : e.g. 7 mm long, diameter 6 mm

Bilder

Aurion Atmospheric Pressure Sputtering System

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